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Low temperature chemical vapour synthesis of Cu3Ge thin films for interconnect applications
Publication:
Low temperature chemical vapour synthesis of Cu3Ge thin films for interconnect applications
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Date
2014
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Peter, Antony
;
Carbonell, Laure
;
Schaekers, Marc
;
Opsomer, Karl
;
Adelmann, Christoph
;
Richard, Olivier
;
Bender, Hugo
;
Franquet, Alexis
;
Meersschaut, Johan
;
Wen, Liang Gong
;
Tokei, Zsolt
;
Van Elshocht, Sven
Journal
Microelectronic Engineering
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1883
since deposited on 2021-10-22
Acq. date: 2025-12-09
Citations
Metrics
Views
1883
since deposited on 2021-10-22
Acq. date: 2025-12-09
Citations