Publication:

Low temperature chemical vapour synthesis of Cu3Ge thin films for interconnect applications

Date

2014

Journal article

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Files

26835.pdf 1.48 MB

Author(s)

;

Carbonell, Laure

;

Schaekers, Marc

;

;

Adelmann, Christoph

;

Richard, Olivier

;

;

Franquet, Alexis

;

Meersschaut, Johan

;

Wen, Liang Gong

;

;

Van Elshocht, Sven

Journal

Microelectronic Engineering

Statistics

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Acq. date: 2026-10-13