Atomic layer deposition of Ruthenium: a theoretical insight

Thumbnail
Metadata
Show full item record
Authors
Phung, Quan; Pourtois, Geoffrey; Swerts, Johan; Pierloot, Kristine; Delabie, Annelies
Conference
10th Congress of the World Association of Theoretical and Computational Chemists
Title
Atomic layer deposition of Ruthenium: a theoretical insight
Publication type
Meeting abstract
Collections