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Influence of CVD diamond growth plasma on AIN thin films

dc.contributor.authorPobedinskas, Paulius
dc.contributor.authorDegutis, Giedrius
dc.contributor.authorDexters, Wim
dc.contributor.authorRuttens, Bart
dc.contributor.authorD'Haen, Jan
dc.contributor.authorHardy, An
dc.contributor.authorVan Bael, Marlies
dc.contributor.authorHaenen, Ken
dc.date.accessioned2021-10-22T04:46:54Z
dc.date.available2021-10-22T04:46:54Z
dc.date.issued2014
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/24390
dc.sourceIIOimport
dc.titleInfluence of CVD diamond growth plasma on AIN thin films
dc.typeOral presentation
dc.contributor.imecauthorPobedinskas, Paulius
dc.contributor.imecauthorRuttens, Bart
dc.contributor.imecauthorD'Haen, Jan
dc.contributor.imecauthorHardy, An
dc.contributor.imecauthorVan Bael, Marlies
dc.contributor.imecauthorHaenen, Ken
dc.contributor.orcidimecPobedinskas, Paulius::0000-0001-8136-5172
dc.contributor.orcidimecRuttens, Bart::0000-0002-9116-6502
dc.contributor.orcidimecVan Bael, Marlies::0000-0002-5516-7962
dc.contributor.orcidimecHaenen, Ken::0000-0001-6711-7367
dc.source.peerreviewno
dc.source.conferenceHasselt Diamond Workshop - SBDD XIX
dc.source.conferencedate19/02/2014
dc.source.conferencelocationHasselt Belgium
imec.availabilityPublished - imec


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