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Characterization of telecentricity errors in high-numerical-aperture extreme ultraviolet mask images

dc.contributor.authorRaghunathan, Sudhar
dc.contributor.authorWood, Obert
dc.contributor.authorMangat, Pawitter
dc.contributor.authorVerduijn, Erik
dc.contributor.authorPhilipsen, Vicky
dc.contributor.authorHendrickx, Eric
dc.contributor.authorJonckheere, Rik
dc.contributor.authorGoldberg, Ken
dc.contributor.authorBenk, Marcus
dc.contributor.authorKearney, Pat
dc.contributor.authorLevinson, Zachary
dc.contributor.authorSmith, Bruce
dc.date.accessioned2021-10-22T04:57:16Z
dc.date.available2021-10-22T04:57:16Z
dc.date.issued2014
dc.identifier.issn1071-1023
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/24413
dc.sourceIIOimport
dc.titleCharacterization of telecentricity errors in high-numerical-aperture extreme ultraviolet mask images
dc.typeJournal article
dc.contributor.imecauthorVerduijn, Erik
dc.contributor.imecauthorPhilipsen, Vicky
dc.contributor.imecauthorHendrickx, Eric
dc.contributor.imecauthorJonckheere, Rik
dc.contributor.orcidimecPhilipsen, Vicky::0000-0002-2959-432X
dc.contributor.orcidimecJonckheere, Rik::0000-0003-2211-9443
dc.source.peerreviewyes
dc.source.beginpage06F801
dc.source.journalJournal of Vacuum Science and Technology B
dc.source.issue6
dc.source.volume32
dc.identifier.urlhttp://scitation.aip.org/content/avs/journal/jvstb/32/6/10.1116/1.4901876
imec.availabilityPublished - imec


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