Publication:

F atoms interaction with nanoporous OSG low-k materials

Date

2014

Meeting abstract

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Author(s)

Rakhimova, T.

;

Rakhimov, A.

;

Zyryanov, S.

;

Lopaev, D.

;

Mankelevich, Y.

;

Proshina, O.

;

Novikova, N.

;

Kurchikov, K.

;

Baklanov, Mikhaïl

Metrics

2022 since deposited on 2021-10-22

Acq. date: 2026-01-08