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Submicron three-terminal SiGe electromechanical ohmic relay

dc.contributor.authorRamezani, Maliheh
dc.contributor.authorCosemans, Stefan
dc.contributor.authorDe Coster, Jeroen
dc.contributor.authorRottenberg, Xavier
dc.contributor.authorRochus, Veronique
dc.contributor.authorOsman, Haris
dc.contributor.authorTilmans, Harrie
dc.contributor.authorSeveri, Simone
dc.contributor.authorDe Meyer, Kristin
dc.date.accessioned2021-10-22T05:00:24Z
dc.date.available2021-10-22T05:00:24Z
dc.date.issued2014
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/24420
dc.sourceIIOimport
dc.titleSubmicron three-terminal SiGe electromechanical ohmic relay
dc.typeProceedings paper
dc.contributor.imecauthorCosemans, Stefan
dc.contributor.imecauthorDe Coster, Jeroen
dc.contributor.imecauthorRottenberg, Xavier
dc.contributor.imecauthorRochus, Veronique
dc.contributor.imecauthorOsman, Haris
dc.contributor.imecauthorTilmans, Harrie
dc.contributor.imecauthorSeveri, Simone
dc.contributor.imecauthorDe Meyer, Kristin
dc.contributor.orcidimecTilmans, Harrie::0000-0003-4240-4962
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage1095
dc.source.endpage1098
dc.source.conference27th International Conference on Micro Electro Mechanical Systems - MEMS
dc.source.conferencedate26/01/2014
dc.source.conferencelocationSan Francisco, CA USA
dc.identifier.urlhttp://ieeexplore.ieee.org/xpls/abs_all.jsp?arnumber=6765836
imec.availabilityPublished - open access


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