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Crystallization and semiconductor-metal switching behavior of thin VO2 layers grown by atomic layer deposition

dc.contributor.authorRampelberg, Geert
dc.contributor.authorDeduytsche, Davy
dc.contributor.authorDe Schutter, Bob
dc.contributor.authorPeter, Antony
dc.contributor.authorToeller, Michael
dc.contributor.authorSchaekers, Marc
dc.contributor.authorMartens, Koen
dc.contributor.authorRadu, Iuliana
dc.contributor.authorDetavernier, Christophe
dc.date.accessioned2021-10-22T05:00:52Z
dc.date.available2021-10-22T05:00:52Z
dc.date.issued2014
dc.identifier.issn0040-6090
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/24421
dc.sourceIIOimport
dc.titleCrystallization and semiconductor-metal switching behavior of thin VO2 layers grown by atomic layer deposition
dc.typeJournal article
dc.contributor.imecauthorPeter, Antony
dc.contributor.imecauthorSchaekers, Marc
dc.contributor.imecauthorMartens, Koen
dc.contributor.imecauthorRadu, Iuliana
dc.contributor.orcidimecSchaekers, Marc::0000-0002-1496-7816
dc.contributor.orcidimecMartens, Koen::0000-0001-7135-5536
dc.contributor.orcidimecRadu, Iuliana::0000-0002-7230-7218
dc.source.peerreviewyes
dc.source.beginpage59
dc.source.endpage64
dc.source.journalThin Solid Films
dc.source.volume550
dc.identifier.urlhttp://www.sciencedirect.com/science/article/pii/S0040609013016404
imec.availabilityPublished - imec


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