Authors

Rampelberg, Geert; Deduytsche, Davy; De Schutter, Bob; Peter, Antony; Toeller, Michael; Schaekers, Marc; Martens, Koen; Radu, Iuliana; Detavernier, Christophe

ISSN

0040-6090

Journal

Thin Solid Films

Volume

550

Title

Crystallization and semiconductor-metal switching behavior of thin VO2 layers grown by atomic layer deposition

Publication type

Journal article