Crystallization and semiconductor-metal switching behavior of thin VO2 layers grown by atomic layer deposition

dc.contributor.author	Rampelberg, Geert
dc.contributor.author	Deduytsche, Davy
dc.contributor.author	De Schutter, Bob
dc.contributor.author	Peter, Antony
dc.contributor.author	Toeller, Michael
dc.contributor.author	Schaekers, Marc
dc.contributor.author	Martens, Koen
dc.contributor.author	Radu, Iuliana
dc.contributor.author	Detavernier, Christophe
dc.contributor.imecauthor	Peter, Antony
dc.contributor.imecauthor	Schaekers, Marc
dc.contributor.imecauthor	Martens, Koen
dc.contributor.imecauthor	Radu, Iuliana
dc.contributor.orcidimec	Schaekers, Marc::0000-0002-1496-7816
dc.contributor.orcidimec	Martens, Koen::0000-0001-7135-5536
dc.contributor.orcidimec	Radu, Iuliana::0000-0002-7230-7218
dc.date.accessioned	2021-10-22T05:00:52Z
dc.date.available	2021-10-22T05:00:52Z
dc.date.issued	2014
dc.identifier.issn	0040-6090
dc.identifier.uri	https://imec-publications.be/handle/20.500.12860/24421
dc.identifier.url	http://www.sciencedirect.com/science/article/pii/S0040609013016404
dc.source.beginpage	59
dc.source.endpage	64
dc.source.journal	Thin Solid Films
dc.source.volume	550
dc.title	Crystallization and semiconductor-metal switching behavior of thin VO2 layers grown by atomic layer deposition
dc.type	Journal article
dspace.entity.type	Publication
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