Etching of III-V materials determined by ICP-MS with sub-nanometer precision

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Authors

Rip, Jens; Cuypers, Daniel; Arnauts, Sophia; Holsteyns, Frank; van Dorp, Dennis; De Gendt, Stefan

ISSN

2162-8769

Issue

1

Journal

ECS Journal of Solid State Science and Technology

Volume

3

Title

Etching of III-V materials determined by ICP-MS with sub-nanometer precision

Publication type

Journal article

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