A low-power HKMG CMOS platform compatible with DRAM node 2x and beyond

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Authors
Ritzenthaler, Romain; Schram, Tom; Spessot, Alessio; Caillat, Christian; Aoulaiche, Marc; Cho, Moon Ju; Noh, Kyung Bong; Son, Yunik; Na, Hoon Jo; Kauerauf, Thomas; Douhard, Bastien; Nazir, Aftab; Chew, Soon Aik; Milenin, Alexey; Altamirano Sanchez, Efrain; Schoofs, Geert; Albert, Johan; Sebaai, Farid; Vecchio, Emma; Paraschiv, Vasile; Vandervorst, Wilfried; Lee, Sun Ghil; Collaert, Nadine; Fazan, Pierre; Horiguchi, Naoto; Thean, Aaron
ISSN
0018-9383
Issue
8
Journal
IEEE Transactions on Electron Devices
Volume
61
Title
A low-power HKMG CMOS platform compatible with DRAM node 2x and beyond
Publication type
Journal article
Embargo date
9999-12-31
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