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Optimization of a poly-SiGe MEMS xylophone bar magnetometer based on its equivalent circuit

dc.contributor.authorRochus, Veronique
dc.contributor.authorFarghaly, Mahmoud
dc.contributor.authorRottenberg, Xavier
dc.contributor.authorTilmans, Harrie
dc.date.accessioned2021-10-22T05:09:14Z
dc.date.available2021-10-22T05:09:14Z
dc.date.issued2014
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/24439
dc.sourceIIOimport
dc.titleOptimization of a poly-SiGe MEMS xylophone bar magnetometer based on its equivalent circuit
dc.typeProceedings paper
dc.contributor.imecauthorRochus, Veronique
dc.contributor.imecauthorRottenberg, Xavier
dc.contributor.imecauthorTilmans, Harrie
dc.contributor.orcidimecTilmans, Harrie::0000-0003-4240-4962
dc.source.peerreviewno
dc.source.beginpage41
dc.source.endpage44
dc.source.conferenceTechConnect World 2014 - Nanotech, Microtech, Biotech, Cleantech Joint Conferences
dc.source.conferencedate16/06/2014
dc.source.conferencelocationWashington, DC USA
imec.availabilityPublished - imec


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