dc.contributor.author | Ronchi, Nicolo | |
dc.contributor.author | De Jaeger, Brice | |
dc.contributor.author | Van Hove, Marleen | |
dc.contributor.author | Roelofs, Robin | |
dc.contributor.author | Wu, Tian-Li | |
dc.contributor.author | Hu, Jie | |
dc.contributor.author | Kang, Xuanwu | |
dc.contributor.author | Decoutere, Stefaan | |
dc.date.accessioned | 2021-10-22T05:15:29Z | |
dc.date.available | 2021-10-22T05:15:29Z | |
dc.date.issued | 2014 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/24452 | |
dc.source | IIOimport | |
dc.title | Combined PEALD gate-dielectric and in-situ SiN cap-layer for reduced Vth shift and RDS-ON dispersion of AlGaN/GaN HEMTs on 200 mm Si wafer | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | Ronchi, Nicolo | |
dc.contributor.imecauthor | De Jaeger, Brice | |
dc.contributor.imecauthor | Decoutere, Stefaan | |
dc.contributor.orcidimec | Ronchi, Nicolo::0000-0002-7961-4077 | |
dc.contributor.orcidimec | De Jaeger, Brice::0000-0001-8804-7556 | |
dc.contributor.orcidimec | Decoutere, Stefaan::0000-0001-6632-6239 | |
dc.source.peerreview | yes | |
dc.source.conference | International Solid State Devices and Materials Conference - SSDM | |
dc.source.conferencedate | 8/09/2014 | |
dc.source.conferencelocation | Tsukuba Japan | |
imec.availability | Published - imec | |