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Exploring alternative metals to Cu and W for interconnects: an ab initio insight

dc.contributor.authorSankaran, Kiroubanand
dc.contributor.authorClima, Sergiu
dc.contributor.authorMees, Maarten
dc.contributor.authorAdelmann, Christoph
dc.contributor.authorTokei, Zsolt
dc.contributor.authorPourtois, Geoffrey
dc.date.accessioned2021-10-22T05:26:54Z
dc.date.available2021-10-22T05:26:54Z
dc.date.issued2014
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/24476
dc.sourceIIOimport
dc.titleExploring alternative metals to Cu and W for interconnects: an ab initio insight
dc.typeProceedings paper
dc.contributor.imecauthorSankaran, Kiroubanand
dc.contributor.imecauthorClima, Sergiu
dc.contributor.imecauthorMees, Maarten
dc.contributor.imecauthorAdelmann, Christoph
dc.contributor.imecauthorTokei, Zsolt
dc.contributor.imecauthorPourtois, Geoffrey
dc.contributor.orcidimecSankaran, Kiroubanand::0000-0001-6988-7269
dc.contributor.orcidimecClima, Sergiu::0000-0002-4044-9975
dc.contributor.orcidimecMees, Maarten::0000-0001-7217-5510
dc.contributor.orcidimecAdelmann, Christoph::0000-0002-4831-3159
dc.contributor.orcidimecPourtois, Geoffrey::0000-0003-2597-8534
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage193
dc.source.endpage195
dc.source.conferenceIEEE International Interconnect Technology Conference / Advanced Metallization Conference - IITC/AMC
dc.source.conferencedate21/05/2014
dc.source.conferencelocationSan Jose, CA USA
dc.identifier.urlhttp://ieeexplore.ieee.org/xpl/articleDetails.jsp?tp=&arnumber=6831868
imec.availabilityPublished - open access


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