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Optimized design of a Si-cap layer in strained-SiGe channel p-MOSFETs based on computational and experimental approaches
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Authors
Sato-Iwanaga, Junko
;
Inoue, Akira
;
Sorada, Haruyuki
;
Takagi, Takeshi
;
Rothschild, Aude
;
Loo, Roger
;
Biesemans, Serge
;
Ito, Choshu
;
Liu, Yang
;
Dutton, Robert W.
;
Tsuchiya, Hideaki
ISSN
0038-1101
Journal
Solid-State Electronics
Volume
91
Title
Optimized design of a Si-cap layer in strained-SiGe channel p-MOSFETs based on computational and experimental approaches
Publication type
Journal article
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