Replicating micro-optical structures using soft embossing technique

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Authors
Shang, Xiaobing; Tan, Jin-Yi; De Smet, Jelle; Joshi, Pankaj; Islamaj, Esma; Cuypers, Dieter; Vervaeke, Michael; Van Erps, Jurgen; Thienpont, Hugo; De Smet, Herbert
Conference
30th European Mask and Lithography Conference
Title
Replicating micro-optical structures using soft embossing technique
Publication type
Proceedings paper
Embargo date
9999-12-31
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