Si cap passivation on InGaAs: a route to reduce oxide traps.

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Authors
Sioncke, Sonja; Nyns, Laura; Vais, Abhitosh; Lin, Dennis; Franco, Jacopo; Bai, Xue; El Kazzi, Salim; Kunert, Bernardette; Porret, Clément; Maurice, Thibaut; Holsteyns, Frank; De Gendt, Stefan; Collaert, Nadine; Heyns, Marc; Thean, Aaron
Conference
IEEE Semiconductor Interfaces Specialist Conference - SISC
Title
Si cap passivation on InGaAs: a route to reduce oxide traps.
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Meeting abstract
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