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Characterization of directed self-assembly process using grazing incidence small angle X-ray scattering
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Authors
Suh, Hyo-Seon
;
Rincon Delgadillo, Paulina
;
Chen, Xuenxuen
;
Wan, Lingshu
;
Jiang, Zhang
;
Strzalka, Joseph
;
Wang, Jin
;
Chen, Wei
;
Gronheid, Roel
;
Nealey, Paul
Conference
SPIE Advanced Lithography Conference
Title
Characterization of directed self-assembly process using grazing incidence small angle X-ray scattering
Publication type
Oral presentation
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