Authors

Sun, Jianwu; Hikavyy, Andriy; Shimura, Yosuke; Witters, Liesbeth; Tielens, Hilde; Ryan, Paul; Loo, Roger

Conference

EMRS Fall Meeting, Symposium J: Alternative Semiconductor Integration in Si Microelectronics: Materials, Techniques & Appl.

Title

Use of X-ray techniques in the development of Ge MOSFET devices

Publication type

Meeting abstract