Authors

Sun, Yiting; Levrau, Elisabeth; Zhang, Liping; Geypen, Jef; Franquet, Alexis; Le, Quoc Toan; de Marneffe, Jean-Francois; Bender, Hugo; Struyf, Herbert; Baklanov, Mikhaïl; Detavernier, Christophe; De Feyter, Steven; Armini, Silvia

Conference

23rd Conference on Materials for Advanced Metallization - MAM

Title

Stuffing-enabled confinement of self-assembled monolayer used as sealing agent on plasma-exposed 2.0 p-OSG films

Publication type

Meeting abstract