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Leakage control in 0.4-nm EOT Ru/SrTiOx/Ru metal-insulator-metal capacitors: process implications

dc.contributor.authorSwerts, Johan
dc.contributor.authorPopovici, Mihaela Ioana
dc.contributor.authorKaczer, Ben
dc.contributor.authorAoulaiche, Marc
dc.contributor.authorRedolfi, Augusto
dc.contributor.authorClima, Sergiu
dc.contributor.authorCaillat, Cristian
dc.contributor.authorWang, W.C.
dc.contributor.authorAfanasiev, Valeri
dc.contributor.authorJourdan, Nicolas
dc.contributor.authorHody, Hubert
dc.contributor.authorOlk, Christina
dc.contributor.authorVan Elshocht, Sven
dc.contributor.authorJurczak, Gosia
dc.date.accessioned2021-10-22T06:17:05Z
dc.date.available2021-10-22T06:17:05Z
dc.date.issued2014
dc.identifier.issn0741-3106
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/24580
dc.sourceIIOimport
dc.titleLeakage control in 0.4-nm EOT Ru/SrTiOx/Ru metal-insulator-metal capacitors: process implications
dc.typeJournal article
dc.contributor.imecauthorSwerts, Johan
dc.contributor.imecauthorPopovici, Mihaela Ioana
dc.contributor.imecauthorKaczer, Ben
dc.contributor.imecauthorRedolfi, Augusto
dc.contributor.imecauthorClima, Sergiu
dc.contributor.imecauthorAfanasiev, Valeri
dc.contributor.imecauthorJourdan, Nicolas
dc.contributor.imecauthorHody, Hubert
dc.contributor.imecauthorVan Elshocht, Sven
dc.contributor.imecauthorJurczak, Gosia
dc.contributor.orcidimecKaczer, Ben::0000-0002-1484-4007
dc.contributor.orcidimecClima, Sergiu::0000-0002-4044-9975
dc.contributor.orcidimecVan Elshocht, Sven::0000-0002-6512-1909
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage753
dc.source.endpage755
dc.source.journalIEEE Electron Device Letters
dc.source.issue7
dc.source.volume37
dc.identifier.urlhttp://www.ieeeexplore.us/xpl/articleDetails.jsp?tp=&arnumber=6820790&queryText%3Dleakage+control+metal-insulator-metal+capacito
imec.availabilityPublished - open access


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