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Impact of the substrate orientation on CHC reliability in n-FinFETs – separation of the various contributions

dc.contributor.authorTallarico, Andrea N.
dc.contributor.authorCho, Moon Ju
dc.contributor.authorFranco, Jacopo
dc.contributor.authorRitzenthaler, Romain
dc.contributor.authorTogo, Mitsuhiro
dc.contributor.authorHoriguchi, Naoto
dc.contributor.authorGroeseneken, Guido
dc.contributor.authorCrupi, Felice
dc.date.accessioned2021-10-22T06:21:45Z
dc.date.available2021-10-22T06:21:45Z
dc.date.issued2014
dc.identifier.issn1530-4388
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/24590
dc.sourceIIOimport
dc.titleImpact of the substrate orientation on CHC reliability in n-FinFETs – separation of the various contributions
dc.typeJournal article
dc.contributor.imecauthorFranco, Jacopo
dc.contributor.imecauthorRitzenthaler, Romain
dc.contributor.imecauthorHoriguchi, Naoto
dc.contributor.imecauthorGroeseneken, Guido
dc.contributor.orcidimecFranco, Jacopo::0000-0002-7382-8605
dc.contributor.orcidimecRitzenthaler, Romain::0000-0002-8615-3272
dc.contributor.orcidimecHoriguchi, Naoto::0000-0001-5490-0416
dc.contributor.orcidimecGroeseneken, Guido::0000-0003-3763-2098
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage52
dc.source.endpage56
dc.source.journalIEEE Transactions on Device and Materials Reliability
dc.source.issue1
dc.source.volume14
dc.identifier.urlhttp://ieeexplore.ieee.org/xpl/articleDetails.jsp?arnumber=6553082
imec.availabilityPublished - imec


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