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Impact of the substrate orientation on CHC reliability in n-FinFETs – separation of the various contributions
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Authors
Tallarico, Andrea N.
;
Cho, Moon Ju
;
Franco, Jacopo
;
Ritzenthaler, Romain
;
Togo, Mitsuhiro
;
Horiguchi, Naoto
;
Groeseneken, Guido
;
Crupi, Felice
ISSN
1530-4388
Issue
1
Journal
IEEE Transactions on Device and Materials Reliability
Volume
14
Title
Impact of the substrate orientation on CHC reliability in n-FinFETs – separation of the various contributions
Publication type
Journal article
Embargo date
9999-12-31
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