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As-grown donor-like traps in low-k dielectrics and their impact on intrinsic TDDB reliability

dc.contributor.authorTang, Baojun
dc.contributor.authorCroes, Kristof
dc.contributor.authorBarbarin, Yohan
dc.contributor.authorWang, Yunqi
dc.contributor.authorDegraeve, Robin
dc.contributor.authorLi, Yunlong
dc.contributor.authorToledano Luque, Maria
dc.contributor.authorKauerauf, Thomas
dc.contributor.authorBoemmels, Juergen
dc.contributor.authorTokei, Zsolt
dc.contributor.authorDe Wolf, Ingrid
dc.date.accessioned2021-10-22T06:23:50Z
dc.date.available2021-10-22T06:23:50Z
dc.date.issued2014
dc.identifier.issn0026-2714
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/24594
dc.sourceIIOimport
dc.titleAs-grown donor-like traps in low-k dielectrics and their impact on intrinsic TDDB reliability
dc.typeJournal article
dc.contributor.imecauthorCroes, Kristof
dc.contributor.imecauthorDegraeve, Robin
dc.contributor.imecauthorLi, Yunlong
dc.contributor.imecauthorBoemmels, Juergen
dc.contributor.imecauthorTokei, Zsolt
dc.contributor.imecauthorDe Wolf, Ingrid
dc.contributor.orcidimecCroes, Kristof::0000-0002-3955-0638
dc.contributor.orcidimecLi, Yunlong::0000-0003-4791-4013
dc.contributor.orcidimecDe Wolf, Ingrid::0000-0003-3822-5953
dc.source.peerreviewyes
dc.source.beginpage1675
dc.source.endpage1679
dc.source.journalMicroelectronics Reliability
dc.source.issue9_10
dc.source.volume54
dc.identifier.urlhttp://www.sciencedirect.com/science/article/pii/S0026271414002856#
imec.availabilityPublished - imec
imec.internalnotesSpecial issue: 25th European Symposium on Reliability of Electron Devices, Failure Physics and Analysis - ESREF; Berlin


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