Publication:

As-grown donor-like traps in low-k dielectrics and their impact on intrinsic TDDB reliability

Date

2014
Journal article
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Author(s)

Tang, Baojun
;
Croes, Kristof  
;
Barbarin, Yohan
;
Wang, Yunqi
;
Degraeve, Robin  
;
Li, Yunlong  
;
Toledano Luque, Maria
;
Kauerauf, Thomas
;
Boemmels, Juergen  
;
Tokei, Zsolt  
;
De Wolf, Ingrid  

Journal

Microelectronics Reliability

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