Authors

Tang, Baojun; Croes, Kristof; Barbarin, Yohan; Wang, Yunqi; Degraeve, Robin; Li, Yunlong; Toledano Luque, Maria; Kauerauf, Thomas; Boemmels, Juergen; Tokei, Zsolt; De Wolf, Ingrid

ISSN

0026-2714

Issue

9_10

Journal

Microelectronics Reliability

Volume

54

Title

As-grown donor-like traps in low-k dielectrics and their impact on intrinsic TDDB reliability

Publication type

Journal article