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As-grown donor-like traps in low-k dielectrics and their impact on intrinsic TDDB reliability
Publication:
As-grown donor-like traps in low-k dielectrics and their impact on intrinsic TDDB reliability
Date
2014
Journal article
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Tang, Baojun
;
Croes, Kristof
;
Barbarin, Yohan
;
Wang, Yunqi
;
Degraeve, Robin
;
Li, Yunlong
;
Toledano Luque, Maria
;
Kauerauf, Thomas
;
Boemmels, Juergen
;
Tokei, Zsolt
;
De Wolf, Ingrid
Journal
Microelectronics Reliability
Abstract
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1960
since deposited on 2021-10-22
Acq. date: 2025-10-23
Citations
Metrics
Views
1960
since deposited on 2021-10-22
Acq. date: 2025-10-23
Citations