Publication:
As-grown donor-like traps in low-k dielectrics and their impact on intrinsic TDDB reliability
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1964 since deposited on 2021-10-22
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Acq. date: 2025-12-08
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1964 since deposited on 2021-10-22
2last month
2last week
Acq. date: 2025-12-08
Citations