Publication:

As-grown donor-like traps in low-k dielectrics and their impact on intrinsic TDDB reliability

Date

2014

Journal article

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Author(s)

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;

Barbarin, Yohan

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;

Degraeve, Robin

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Toledano Luque, Maria

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Kauerauf, Thomas

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Boemmels, Juergen

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De Wolf, Ingrid

Journal

Microelectronics Reliability

Statistics

1972 since deposited on 2021-10-22

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Acq. date: 2026-02-24