Publication:

As-grown donor-like traps in low-k dielectrics and their impact on intrinsic TDDB reliability

Date

2014
Journal article
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dc.contributor.authorTang, Baojun
dc.contributor.authorCroes, Kristof
dc.contributor.authorBarbarin, Yohan
dc.contributor.authorWang, Yunqi
dc.contributor.authorDegraeve, Robin
dc.contributor.authorLi, Yunlong
dc.contributor.authorToledano Luque, Maria
dc.contributor.authorKauerauf, Thomas
dc.contributor.authorBoemmels, Juergen
dc.contributor.authorTokei, Zsolt
dc.contributor.authorDe Wolf, Ingrid
dc.contributor.imecauthorCroes, Kristof
dc.contributor.imecauthorDegraeve, Robin
dc.contributor.imecauthorLi, Yunlong
dc.contributor.imecauthorBoemmels, Juergen
dc.contributor.imecauthorTokei, Zsolt
dc.contributor.imecauthorDe Wolf, Ingrid
dc.contributor.orcidimecCroes, Kristof::0000-0002-3955-0638
dc.contributor.orcidimecLi, Yunlong::0000-0003-4791-4013
dc.contributor.orcidimecDe Wolf, Ingrid::0000-0003-3822-5953
dc.date.accessioned2021-10-22T06:23:50Z
dc.date.available2021-10-22T06:23:50Z
dc.date.issued2014
dc.identifier.issn0026-2714
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/24594
dc.identifier.urlhttp://www.sciencedirect.com/science/article/pii/S0026271414002856#
dc.source.beginpage1675
dc.source.endpage1679
dc.source.issue9_10
dc.source.journalMicroelectronics Reliability
dc.source.volume54
dc.title

As-grown donor-like traps in low-k dielectrics and their impact on intrinsic TDDB reliability

dc.typeJournal article
dspace.entity.typePublication
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