Authors

Conard, Thierry; Kondoh, Eiichi; Vandervorst, Wilfried; Maex, Karen

Conference

American Vacuum Society 45th International Symposium; 2-6 November 1998; Baltimore, MD, USA.

Title

XPS study of the role of Ti and TiN caps on the Cobalt/SiO2 interface

Publication type

Oral presentation