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Mobility improvement study for 8-Å-EOT HfO2 UTBB-FD-SOI-MOSFET based on the direct extraction of the back channel mobility
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Authors
Trojman, Lionel
;
Ragnarsson, Lars-Ake
;
Collaert, Nadine
ISSN
0018-9383
Issue
11
Journal
IEEE Transactions on Electron Devices
Volume
61
Title
Mobility improvement study for 8-Å-EOT HfO2 UTBB-FD-SOI-MOSFET based on the direct extraction of the back channel mobility
Publication type
Journal article
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