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Dummy design characterization for STI CMP with fixed abrasive

dc.contributor.authorTsvetanova, Diana
dc.contributor.authorDevriendt, Katia
dc.contributor.authorOng, Patrick
dc.contributor.authorVandeweyer, Tom
dc.contributor.authorDelande, Tinne
dc.contributor.authorChew, Soon Aik
dc.contributor.authorHoriguchi, Naoto
dc.contributor.authorStruyf, Herbert
dc.date.accessioned2021-10-22T06:45:21Z
dc.date.available2021-10-22T06:45:21Z
dc.date.issued2014-11
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/24638
dc.sourceIIOimport
dc.titleDummy design characterization for STI CMP with fixed abrasive
dc.typeProceedings paper
dc.contributor.imecauthorTsvetanova, Diana
dc.contributor.imecauthorDevriendt, Katia
dc.contributor.imecauthorOng, Patrick
dc.contributor.imecauthorVandeweyer, Tom
dc.contributor.imecauthorDelande, Tinne
dc.contributor.imecauthorHoriguchi, Naoto
dc.contributor.imecauthorStruyf, Herbert
dc.contributor.orcidimecDevriendt, Katia::0000-0002-0662-7926
dc.contributor.orcidimecOng, Patrick::0000-0002-2072-292X
dc.contributor.orcidimecHoriguchi, Naoto::0000-0001-5490-0416
dc.source.peerreviewyes
dc.source.beginpage199
dc.source.endpage202
dc.source.conferenceInternational Conference on Planarization Technology - ICPT
dc.source.conferencedate19/11/2014
dc.source.conferencelocationKobe Japan
dc.identifier.urlhttp://ieeexplore.ieee.org/xpl/articleDetails.jsp?tp=&arnumber=7017279
imec.availabilityPublished - imec


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