Co-Sn intermetallic compoundsfor potential integration in 3D interconnects

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Authors
Vakanas, George; O, Minho; Dimcic, Biljana; Vandecasteele, Bjorn; Vanstreels, Kris; De Messemaeker, Joke; De Preter, Inge; Derakhshandeh, Jaber; Guerrieri, Stefano; Rebibis, Kenneth June; La Manna, Antonio; Kajihara, Masanori; De Wolf, Ingrid; Beyne, Eric
Conference
23rd Conference on Materials for Advanced Metallization - MAM
Title
Co-Sn intermetallic compoundsfor potential integration in 3D interconnects
Publication type
Meeting abstract
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