Low-k a-SiCO:H films as diffusion barriers for advanced interconnects

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Authors
Van Besien, Els; Singh, Arjun; Barbarin, Yohan; Verdonck, Patrick; Dekkers, Harold; Vanstreels, Kris; de Marneffe, Jean-Francois; Baklanov, Mikhaïl; Van Elshocht, Sven
ISSN
0167-9317
Journal
Microelectronic Engineering
Volume
120
Title
Low-k a-SiCO:H films as diffusion barriers for advanced interconnects
Publication type
Journal article
Embargo date
9999-12-31
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