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Optimization of vertical carbon nanotube interconnects using the direct electrical comparison of integration steps

dc.contributor.authorvan der Veen, Marleen
dc.contributor.authorBarbarin, Yohan
dc.contributor.authorBoemmels, Juergen
dc.contributor.authorTokei, Zsolt
dc.date.accessioned2021-10-22T07:06:50Z
dc.date.available2021-10-22T07:06:50Z
dc.date.issued2014-11
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/24682
dc.sourceIIOimport
dc.titleOptimization of vertical carbon nanotube interconnects using the direct electrical comparison of integration steps
dc.typeProceedings paper
dc.contributor.imecauthorvan der Veen, Marleen
dc.contributor.imecauthorBoemmels, Juergen
dc.contributor.imecauthorTokei, Zsolt
dc.contributor.orcidimecvan der Veen, Marleen::0000-0002-9402-8922
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage7D-8-1
dc.source.conference27th International Microprocesses and Nanotechnology Conference - MNC
dc.source.conferencedate4/11/2014
dc.source.conferencelocationFukuoka Japan
dc.identifier.urlhttp://imnc.jp/invited2014.html
imec.availabilityPublished - open access


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