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Electron mean-free path for CNT in vertical interconnects approaches Cu

dc.contributor.authorvan der Veen, Marleen
dc.contributor.authorBarbarin, Yohan
dc.contributor.authorKashiwagi, Yusaku
dc.contributor.authorTokei, Zsolt
dc.date.accessioned2021-10-22T07:07:18Z
dc.date.available2021-10-22T07:07:18Z
dc.date.issued2014
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/24683
dc.sourceIIOimport
dc.titleElectron mean-free path for CNT in vertical interconnects approaches Cu
dc.typeProceedings paper
dc.contributor.imecauthorvan der Veen, Marleen
dc.contributor.imecauthorTokei, Zsolt
dc.contributor.orcidimecvan der Veen, Marleen::0000-0002-9402-8922
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage181
dc.source.endpage184
dc.source.conferenceIEEE International Interconnect Technology Conference - IITC
dc.source.conferencedate20/05/2014
dc.source.conferencelocationSan Jose, CA USA
dc.identifier.urlhttp://ieeexplore.ieee.org/xpl/articleDetails.jsp?tp=&arnumber=6831865&queryText%3DElectron+mean-free+path+for+CNT+in+vertical+i
imec.availabilityPublished - open access


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