dc.contributor.author | van Dorp, Dennis | |
dc.contributor.author | Arnauts, Sophia | |
dc.contributor.author | Cuypers, Daniel | |
dc.contributor.author | Rip, Jens | |
dc.contributor.author | Holsteyns, Frank | |
dc.contributor.author | De Gendt, Stefan | |
dc.date.accessioned | 2021-10-22T07:09:04Z | |
dc.date.available | 2021-10-22T07:09:04Z | |
dc.date.issued | 2014 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/24687 | |
dc.source | IIOimport | |
dc.title | Nanoscale etching and reoxidation of InAs | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | van Dorp, Dennis | |
dc.contributor.imecauthor | Arnauts, Sophia | |
dc.contributor.imecauthor | Rip, Jens | |
dc.contributor.imecauthor | Holsteyns, Frank | |
dc.contributor.imecauthor | De Gendt, Stefan | |
dc.contributor.orcidimec | van Dorp, Dennis::0000-0002-1085-4232 | |
dc.contributor.orcidimec | De Gendt, Stefan::0000-0003-3775-3578 | |
dc.source.peerreview | yes | |
dc.source.beginpage | 56 | |
dc.source.endpage | 58 | |
dc.source.conference | Ultra Clean Processing of Semiconductor Surfaces XII - UCPSS | |
dc.source.conferencedate | 21/09/2014 | |
dc.source.conferencelocation | Brussels Belgium | |
dc.identifier.url | http://www.scientific.net/SSP.219.56 | |
imec.availability | Published - imec | |
imec.internalnotes | Solid State Phenomena; Vol. 219 | |