dc.contributor.author | Vandenberghe, Geert | |
dc.contributor.author | De Simone, Danilo | |
dc.contributor.author | Gronheid, Roel | |
dc.date.accessioned | 2021-10-22T07:27:38Z | |
dc.date.available | 2021-10-22T07:27:38Z | |
dc.date.issued | 2014 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/24725 | |
dc.source | IIOimport | |
dc.title | Advanced lithography materials as key scaling enablers | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | Vandenberghe, Geert | |
dc.contributor.imecauthor | De Simone, Danilo | |
dc.contributor.imecauthor | Gronheid, Roel | |
dc.contributor.orcidimec | De Simone, Danilo::0000-0003-3927-5207 | |
dc.date.embargo | 9999-12-31 | |
dc.source.peerreview | no | |
dc.source.beginpage | 7A-8-2 | |
dc.source.conference | 27th International Microprocesses and Nanotechnology Conference - MNC | |
dc.source.conferencedate | 4/11/2014 | |
dc.source.conferencelocation | Fukuoka Japan | |
imec.availability | Published - open access | |