Dopant/carrier profiling for 3D-structures

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Authors

Vandervorst, Wilfried; Schulze, Andreas; Kambham, Ajay Kumar; Mody, Jay; Gilbert, Matthieu; Eyben, Pierre

ISSN

1610-1634

Issue

1

Journal

Physica Status Solidi C

Volume

11

Title

Dopant/carrier profiling for 3D-structures

Publication type

Journal article

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