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Dopant/carrier profiling for 3D-structures

dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorSchulze, Andreas
dc.contributor.authorKambham, Ajay Kumar
dc.contributor.authorMody, Jay
dc.contributor.authorGilbert, Matthieu
dc.contributor.authorEyben, Pierre
dc.date.accessioned2021-10-22T07:28:43Z
dc.date.available2021-10-22T07:28:43Z
dc.date.issued2014
dc.identifier.issn1610-1634
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/24727
dc.sourceIIOimport
dc.titleDopant/carrier profiling for 3D-structures
dc.typeJournal article
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.imecauthorEyben, Pierre
dc.source.peerreviewyes
dc.source.beginpage121
dc.source.endpage129
dc.source.journalPhysica Status Solidi C
dc.source.issue1
dc.source.volume11
dc.identifier.urlhttp://onlinelibrary.wiley.com/doi/10.1002/pssc.201300329/abstract
imec.availabilityPublished - imec


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