dc.contributor.author | Verdonck, Patrick | |
dc.contributor.author | Wilson, Chris | |
dc.contributor.author | Wen, Liang Gong | |
dc.date.accessioned | 2021-10-22T07:48:14Z | |
dc.date.available | 2021-10-22T07:48:14Z | |
dc.date.issued | 2014 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/24764 | |
dc.source | IIOimport | |
dc.title | The effects of scaling on back end of line processing | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | Verdonck, Patrick | |
dc.contributor.imecauthor | Wilson, Chris | |
dc.contributor.orcidimec | Verdonck, Patrick::0000-0003-2454-0602 | |
dc.date.embargo | 9999-12-31 | |
dc.source.peerreview | no | |
dc.source.beginpage | 1 | |
dc.source.endpage | 4 | |
dc.source.conference | 29th Symposium on Microelectronics Technology and Devices - SBMICRO | |
dc.source.conferencedate | 1/09/2014 | |
dc.source.conferencelocation | Aracaju Brazil | |
dc.identifier.url | http://ieeexplore.ieee.org/xpl/articleDetails.jsp?tp=&arnumber=6940080&queryText%3DThe+effects+of+scaling+on+back+end+of+line+pr | |
imec.availability | Published - open access | |