Effect of oxidation ramp up on the redistribution of metallic contamination in gate oxides

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Authors
Mertens, Paul; Rotondaro, Antonio; Meuris, Marc; Schmidt, Harald; Heyns, Marc; Gräf, D.
Conference
Proceedings of the Institute of Environmental Science: 40th Annual Technical Meeting
Title
Effect of oxidation ramp up on the redistribution of metallic contamination in gate oxides
Publication type
Proceedings paper
Embargo date
9999-12-31
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