High Q photonic crystal cavities realised using deep ultraviolet lithography

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Authors
Welna, Karl; Debnath, K.; Dumon, Pieter; Khanna, Amit; Krauss, T.F.; O'Faolain, Liam
Conference
11th International Conference on Group IV Photonics - GFP
Title
High Q photonic crystal cavities realised using deep ultraviolet lithography
Publication type
Proceedings paper
Embargo date
9999-12-31
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