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Improved performance of highly multiplexed silicon-on-insulator microring sensor chips by surface structure implementation

dc.contributor.authorWerquin, Sam
dc.contributor.authorVermeulen, Diedrik
dc.contributor.authorGoes, Arne
dc.contributor.authorVan Eeghem, Anabelle
dc.contributor.authorDubruel, Peter
dc.contributor.authorBienstman, Peter
dc.date.accessioned2021-10-22T08:16:40Z
dc.date.available2021-10-22T08:16:40Z
dc.date.issued2014
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/24816
dc.sourceIIOimport
dc.titleImproved performance of highly multiplexed silicon-on-insulator microring sensor chips by surface structure implementation
dc.typeProceedings paper
dc.contributor.imecauthorBienstman, Peter
dc.contributor.orcidimecBienstman, Peter::0000-0001-6259-464X
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage89540O
dc.source.conferenceNanoscale Imaging, Sensing, and Actuation for Biomedical Applications XI
dc.source.conferencedate20/02/2014
dc.source.conferencelocationSan Francisco, CA USA
dc.identifier.urlhttp://proceedings.spiedigitallibrary.org/proceeding.aspx?articleid=1833882
imec.availabilityPublished - open access
imec.internalnotesProceedings of SPIE; Vol. 8954


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