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Integration aspects of strained Ge pFETs

dc.contributor.authorWitters, Liesbeth
dc.contributor.authorEneman, Geert
dc.contributor.authorMitard, Jerome
dc.contributor.authorVincent, Benjamin
dc.contributor.authorLoo, Roger
dc.contributor.authorHikavyy, Andriy
dc.contributor.authorMilenin, Alexey
dc.contributor.authorMertens, Sofie
dc.contributor.authorThean, Aaron
dc.contributor.authorCollaert, Nadine
dc.date.accessioned2021-10-22T08:21:21Z
dc.date.available2021-10-22T08:21:21Z
dc.date.issued2014-08
dc.identifier.issn0038-1101
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/24825
dc.sourceIIOimport
dc.titleIntegration aspects of strained Ge pFETs
dc.typeJournal article
dc.contributor.imecauthorWitters, Liesbeth
dc.contributor.imecauthorEneman, Geert
dc.contributor.imecauthorMitard, Jerome
dc.contributor.imecauthorVincent, Benjamin
dc.contributor.imecauthorLoo, Roger
dc.contributor.imecauthorHikavyy, Andriy
dc.contributor.imecauthorMilenin, Alexey
dc.contributor.imecauthorMertens, Sofie
dc.contributor.imecauthorThean, Aaron
dc.contributor.imecauthorCollaert, Nadine
dc.contributor.orcidimecEneman, Geert::0000-0002-5849-3384
dc.contributor.orcidimecMitard, Jerome::0000-0002-7422-079X
dc.contributor.orcidimecLoo, Roger::0000-0003-3513-6058
dc.contributor.orcidimecHikavyy, Andriy::0000-0002-8201-075X
dc.contributor.orcidimecMilenin, Alexey::0000-0003-0747-0462
dc.contributor.orcidimecMertens, Sofie::0000-0002-1482-6730
dc.contributor.orcidimecCollaert, Nadine::0000-0002-8062-3165
dc.source.peerreviewyes
dc.source.beginpage7
dc.source.endpage11
dc.source.journalSolid-State Electronics
dc.source.volume98
dc.identifier.urlhttp://www.sciencedirect.com/science/article/pii/S0038110114000574
imec.availabilityPublished - imec
imec.internalnotes


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