Toggle navigation
My submissions
Login
Toggle navigation
View item
imec Publications Repository
imec Publications
Articles
View item
imec Publications Repository
imec Publications
Articles
View item
JavaScript is disabled for your browser. Some features of this site may not work without it.
Increased carbon nanotube density after catalyst generation from cobalt disilicide using a cyclic reactive ion etching approach
View/
open
28701.pdf (1.221Mb)
Metadata
Show full item record
Authors
Xie, Rongsi
;
Zhang, Can
;
Chen, Bingan
;
van der Veen, Marleen
;
Zhong, Guofang
;
Robertson, john
ISSN
0021-8979
Issue
14
Journal
Journal of Applied Physics
Volume
115
Title
Increased carbon nanotube density after catalyst generation from cobalt disilicide using a cyclic reactive ion etching approach
Publication type
Journal article
Embargo date
9999-12-31
Collections
Articles
Search imec Publications Repository
This collection
Browse
All of imec Publications Repository
Collections
Publication date
Authors
Titles
Subjects
imec author
Availability
Publication type
This collection
Publication date
Authors
Titles
Subjects
imec author
Availability
Publication type
My account
login