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Increased carbon nanotube density after catalyst generation from cobalt disilicide using a cyclic reactive ion etching approach

dc.contributor.authorXie, Rongsi
dc.contributor.authorZhang, Can
dc.contributor.authorChen, Bingan
dc.contributor.authorvan der Veen, Marleen
dc.contributor.authorZhong, Guofang
dc.contributor.authorRobertson, john
dc.date.accessioned2021-10-22T08:31:25Z
dc.date.available2021-10-22T08:31:25Z
dc.date.issued2014
dc.identifier.issn0021-8979
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/24843
dc.sourceIIOimport
dc.titleIncreased carbon nanotube density after catalyst generation from cobalt disilicide using a cyclic reactive ion etching approach
dc.typeJournal article
dc.contributor.imecauthorvan der Veen, Marleen
dc.contributor.orcidimecvan der Veen, Marleen::0000-0002-9402-8922
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage144302
dc.source.journalJournal of Applied Physics
dc.source.issue14
dc.source.volume115
dc.identifier.urlhttp://scitation.aip.org/content/aip/journal/jap/115/14/10.1063/1.4870949
imec.availabilityPublished - open access


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