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High-Q free-standing silicon nitride microdisk vertically coupled with on-chip waveguide

dc.contributor.authorXie, Weiqiang
dc.contributor.authorVan Thourhout, Dries
dc.date.accessioned2021-10-22T08:32:27Z
dc.date.available2021-10-22T08:32:27Z
dc.date.issued2014
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/24845
dc.sourceIIOimport
dc.titleHigh-Q free-standing silicon nitride microdisk vertically coupled with on-chip waveguide
dc.typeProceedings paper
dc.contributor.imecauthorVan Thourhout, Dries
dc.contributor.orcidimecVan Thourhout, Dries::0000-0003-0111-431X
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpageSTu3M.3
dc.source.conferenceCLEO: Science and Innovations
dc.source.conferencedate8/06/2014
dc.source.conferencelocationSan Jose, CA USA
dc.identifier.urlhttp://www.opticsinfobase.org/abstract.cfm?uri=CLEO_SI-2014-STu3M.3
imec.availabilityPublished - open access
imec.internalnotes


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