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Fabrication of high-Q silicon nitride microdisk resonator coupled with on-chip waveguide

dc.contributor.authorXie, Weiqiang
dc.contributor.authorVan Thourhout, Dries
dc.date.accessioned2021-10-22T08:32:54Z
dc.date.available2021-10-22T08:32:54Z
dc.date.issued2014
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/24846
dc.sourceIIOimport
dc.titleFabrication of high-Q silicon nitride microdisk resonator coupled with on-chip waveguide
dc.typeProceedings paper
dc.contributor.imecauthorVan Thourhout, Dries
dc.contributor.orcidimecVan Thourhout, Dries::0000-0003-0111-431X
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.conferenceProceedings Symposium IEEE Photonics Society Benelux
dc.source.conferencedate3/11/2014
dc.source.conferencelocationEnschede The Netherlands
imec.availabilityPublished - open access


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