Stochastic modeling of polyethylene glycol as a suppressor in copper electroplating

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Authors

Yang, Liu; Radisic, Alex; Deconinck, Johan; Vereecken, Philippe

ISSN

0013-4651

Issue

5

Journal

Journal of the Electrochemical Society

Volume

161

Title

Stochastic modeling of polyethylene glycol as a suppressor in copper electroplating

Publication type

Journal article

Embargo date

9999-12-31

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