Challenges in BEOL cleaning for the 10 nm node and beyond

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Authors
Yu, David; Le, Quoc Toan; Braun, Simon; Kesters, Els; Shen, Mary; Klipp, Andreas; Holsteyns, Frank
Conference
Sematech Surface Preparation and Cleaning Conference
Title
Challenges in BEOL cleaning for the 10 nm node and beyond
Publication type
Meeting abstract
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